8/18/2010	8:38:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	8:38:27 AM	Recipe started at 8:38 AM
8/18/2010	8:38:27 AM	Helium valve closed
8/18/2010	8:38:27 AM	H2 valve closed
8/18/2010	8:38:27 AM	BCl3 valve closed
8/18/2010	8:38:27 AM	PH3 valve closed
8/18/2010	8:38:27 AM	SiCl4 pre valve closed
8/18/2010	8:38:27 AM	SiCl4 post valve closed
8/18/2010	8:38:27 AM	Main Vac valve closed
8/18/2010	8:38:27 AM	Bubbler valve closed
8/18/2010	8:38:27 AM	Bypass valve opened
8/18/2010	8:38:27 AM	Helium MFC set to  0.000000
8/18/2010	8:38:27 AM	H2 MFC set to  0.000000
8/18/2010	8:38:27 AM	BCl3 MFC set to  0.000000
8/18/2010	8:38:27 AM	PHl3 MFC set to  0.000000
8/18/2010	8:38:27 AM	SiCl4 MFC set to  0.000000
8/18/2010	8:38:27 AM	Bypass solenoid MFC set to  0.000000
8/18/2010	8:38:27 AM	Tube furnace set to 0
8/18/2010	8:39:06 AM	Helium valve closed
8/18/2010	8:39:06 AM	H2 valve closed
8/18/2010	8:39:06 AM	BCl3 valve closed
8/18/2010	8:39:06 AM	PH3 valve closed
8/18/2010	8:39:06 AM	SiCl4 pre valve closed
8/18/2010	8:39:06 AM	SiCl4 post valve closed
8/18/2010	8:39:06 AM	Bubbler valve closed
8/18/2010	8:39:06 AM	Main Vac valve opened
8/18/2010	8:39:06 AM	Bypass valve opened
8/18/2010	8:39:06 AM	Helium MFC set to  0.000000
8/18/2010	8:39:06 AM	H2 MFC set to  0.000000
8/18/2010	8:39:06 AM	BCl3 MFC set to  0.000000
8/18/2010	8:39:06 AM	PHl3 MFC set to  0.000000
8/18/2010	8:39:06 AM	SiCl4 MFC set to  0.000000
8/18/2010	8:39:06 AM	Bypass solenoid MFC set to  0.000000
8/18/2010	8:39:06 AM	Tube furnace set to 0
8/18/2010	8:39:07 AM	Run finished at 8:39 AM
8/18/2010	8:39:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	2:26:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2010	2:26:27 PM	Recipe started at 2:26 PM
8/18/2010	2:26:27 PM	H2 valve closed
8/18/2010	2:26:27 PM	BCl3 valve closed
8/18/2010	2:26:27 PM	PH3 valve closed
8/18/2010	2:26:27 PM	SiCl4 pre valve closed
8/18/2010	2:26:27 PM	SiCl4 post valve closed
8/18/2010	2:26:27 PM	Main Vac valve closed
8/18/2010	2:26:27 PM	Bypass valve closed
8/18/2010	2:26:27 PM	Bubbler valve closed
8/18/2010	2:26:27 PM	Helium valve opened
8/18/2010	2:26:27 PM	Helium MFC set to  500.000000
8/18/2010	2:26:27 PM	H2 MFC set to  0.000000
8/18/2010	2:26:27 PM	BCl3 MFC set to  0.000000
8/18/2010	2:26:27 PM	PHl3 MFC set to  0.000000
8/18/2010	2:26:27 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:26:27 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:26:27 PM	Tube furnace set to 0
8/18/2010	2:27:46 PM	Helium valve closed
8/18/2010	2:27:46 PM	H2 valve closed
8/18/2010	2:27:46 PM	BCl3 valve closed
8/18/2010	2:27:46 PM	PH3 valve closed
8/18/2010	2:27:46 PM	SiCl4 pre valve closed
8/18/2010	2:27:46 PM	SiCl4 post valve closed
8/18/2010	2:27:46 PM	Main Vac valve closed
8/18/2010	2:27:46 PM	Bypass valve closed
8/18/2010	2:27:46 PM	Bubbler valve closed
8/18/2010	2:27:46 PM	Helium MFC set to  0.000000
8/18/2010	2:27:46 PM	H2 MFC set to  0.000000
8/18/2010	2:27:46 PM	BCl3 MFC set to  0.000000
8/18/2010	2:27:46 PM	PHl3 MFC set to  0.000000
8/18/2010	2:27:46 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:27:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:27:46 PM	Tube furnace set to 0
8/18/2010	2:27:46 PM	Run finished at 2:27 PM
8/18/2010	2:27:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2010	2:31:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	2:31:41 PM	Recipe started at 2:31 PM
8/18/2010	2:31:41 PM	Helium valve closed
8/18/2010	2:31:41 PM	H2 valve closed
8/18/2010	2:31:41 PM	BCl3 valve closed
8/18/2010	2:31:41 PM	PH3 valve closed
8/18/2010	2:31:41 PM	SiCl4 pre valve closed
8/18/2010	2:31:41 PM	SiCl4 post valve closed
8/18/2010	2:31:41 PM	Main Vac valve closed
8/18/2010	2:31:41 PM	Bubbler valve closed
8/18/2010	2:31:41 PM	Bypass valve opened
8/18/2010	2:31:41 PM	Helium MFC set to  0.000000
8/18/2010	2:31:41 PM	H2 MFC set to  0.000000
8/18/2010	2:31:41 PM	BCl3 MFC set to  0.000000
8/18/2010	2:31:41 PM	PHl3 MFC set to  0.000000
8/18/2010	2:31:41 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:31:41 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:31:41 PM	Tube furnace set to 0
8/18/2010	2:35:22 PM	Run aborted at 2:35 PM
8/18/2010	2:35:22 PM	Helium valve closed
8/18/2010	2:35:22 PM	H2 valve closed
8/18/2010	2:35:22 PM	BCl3 valve closed
8/18/2010	2:35:22 PM	PH3 valve closed
8/18/2010	2:35:22 PM	SiCl4 pre valve closed
8/18/2010	2:35:22 PM	SiCl4 post valve closed
8/18/2010	2:35:22 PM	Bypass valve closed
8/18/2010	2:35:22 PM	Main Vac valve closed
8/18/2010	2:35:22 PM	Bubbler valve closed
8/18/2010	2:35:22 PM	Helium MFC set to  0.000000
8/18/2010	2:35:22 PM	H2 MFC set to  0.000000
8/18/2010	2:35:22 PM	BCl3 MFC set to  0.000000
8/18/2010	2:35:22 PM	PHl3 MFC set to  0.000000
8/18/2010	2:35:22 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:35:22 PM	Tube furnace set to 0
8/18/2010	2:35:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	2:35:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2010	2:35:25 PM	Recipe started at 2:35 PM
8/18/2010	2:35:25 PM	H2 valve closed
8/18/2010	2:35:25 PM	BCl3 valve closed
8/18/2010	2:35:25 PM	PH3 valve closed
8/18/2010	2:35:25 PM	SiCl4 pre valve closed
8/18/2010	2:35:25 PM	SiCl4 post valve closed
8/18/2010	2:35:25 PM	Main Vac valve closed
8/18/2010	2:35:25 PM	Bypass valve closed
8/18/2010	2:35:25 PM	Bubbler valve closed
8/18/2010	2:35:25 PM	Helium valve opened
8/18/2010	2:35:25 PM	Helium MFC set to  500.000000
8/18/2010	2:35:25 PM	H2 MFC set to  0.000000
8/18/2010	2:35:25 PM	BCl3 MFC set to  0.000000
8/18/2010	2:35:25 PM	PHl3 MFC set to  0.000000
8/18/2010	2:35:25 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:35:25 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:35:25 PM	Tube furnace set to 0
8/18/2010	2:35:40 PM	Helium valve closed
8/18/2010	2:35:40 PM	H2 valve closed
8/18/2010	2:35:40 PM	BCl3 valve closed
8/18/2010	2:35:40 PM	PH3 valve closed
8/18/2010	2:35:40 PM	SiCl4 pre valve closed
8/18/2010	2:35:40 PM	SiCl4 post valve closed
8/18/2010	2:35:40 PM	Main Vac valve closed
8/18/2010	2:35:40 PM	Bypass valve closed
8/18/2010	2:35:40 PM	Bubbler valve closed
8/18/2010	2:35:40 PM	Helium MFC set to  0.000000
8/18/2010	2:35:40 PM	H2 MFC set to  0.000000
8/18/2010	2:35:40 PM	BCl3 MFC set to  0.000000
8/18/2010	2:35:40 PM	PHl3 MFC set to  0.000000
8/18/2010	2:35:40 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:35:40 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:35:40 PM	Tube furnace set to 0
8/18/2010	2:35:40 PM	Run finished at 2:35 PM
8/18/2010	2:35:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2010	2:37:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	2:37:10 PM	Recipe started at 2:37 PM
8/18/2010	2:37:10 PM	Helium valve closed
8/18/2010	2:37:10 PM	H2 valve closed
8/18/2010	2:37:10 PM	BCl3 valve closed
8/18/2010	2:37:10 PM	PH3 valve closed
8/18/2010	2:37:10 PM	SiCl4 pre valve closed
8/18/2010	2:37:10 PM	SiCl4 post valve closed
8/18/2010	2:37:10 PM	Main Vac valve closed
8/18/2010	2:37:10 PM	Bubbler valve closed
8/18/2010	2:37:10 PM	Bypass valve opened
8/18/2010	2:37:10 PM	Helium MFC set to  0.000000
8/18/2010	2:37:10 PM	H2 MFC set to  0.000000
8/18/2010	2:37:10 PM	BCl3 MFC set to  0.000000
8/18/2010	2:37:10 PM	PHl3 MFC set to  0.000000
8/18/2010	2:37:10 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:37:10 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:37:10 PM	Tube furnace set to 0
8/18/2010	2:37:53 PM	Helium valve closed
8/18/2010	2:37:53 PM	H2 valve closed
8/18/2010	2:37:53 PM	BCl3 valve closed
8/18/2010	2:37:53 PM	PH3 valve closed
8/18/2010	2:37:53 PM	SiCl4 pre valve closed
8/18/2010	2:37:53 PM	SiCl4 post valve closed
8/18/2010	2:37:53 PM	Bubbler valve closed
8/18/2010	2:37:53 PM	Main Vac valve opened
8/18/2010	2:37:53 PM	Bypass valve opened
8/18/2010	2:37:53 PM	Helium MFC set to  0.000000
8/18/2010	2:37:53 PM	H2 MFC set to  0.000000
8/18/2010	2:37:53 PM	BCl3 MFC set to  0.000000
8/18/2010	2:37:53 PM	PHl3 MFC set to  0.000000
8/18/2010	2:37:53 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:37:53 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:37:53 PM	Tube furnace set to 0
8/18/2010	2:37:54 PM	Run finished at 2:37 PM
8/18/2010	2:37:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	2:56:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2010	2:56:47 PM	Recipe started at 2:56 PM
8/18/2010	2:56:47 PM	H2 valve closed
8/18/2010	2:56:47 PM	BCl3 valve closed
8/18/2010	2:56:47 PM	PH3 valve closed
8/18/2010	2:56:47 PM	SiCl4 pre valve closed
8/18/2010	2:56:47 PM	SiCl4 post valve closed
8/18/2010	2:56:47 PM	Main Vac valve closed
8/18/2010	2:56:47 PM	Bypass valve closed
8/18/2010	2:56:47 PM	Bubbler valve closed
8/18/2010	2:56:47 PM	Helium valve opened
8/18/2010	2:56:47 PM	Helium MFC set to  500.000000
8/18/2010	2:56:47 PM	H2 MFC set to  0.000000
8/18/2010	2:56:47 PM	BCl3 MFC set to  0.000000
8/18/2010	2:56:47 PM	PHl3 MFC set to  0.000000
8/18/2010	2:56:47 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:56:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:56:48 PM	Tube furnace set to 0
8/18/2010	2:58:07 PM	Helium valve closed
8/18/2010	2:58:07 PM	H2 valve closed
8/18/2010	2:58:07 PM	BCl3 valve closed
8/18/2010	2:58:07 PM	PH3 valve closed
8/18/2010	2:58:07 PM	SiCl4 pre valve closed
8/18/2010	2:58:07 PM	SiCl4 post valve closed
8/18/2010	2:58:07 PM	Main Vac valve closed
8/18/2010	2:58:07 PM	Bypass valve closed
8/18/2010	2:58:07 PM	Bubbler valve closed
8/18/2010	2:58:07 PM	Helium MFC set to  0.000000
8/18/2010	2:58:07 PM	H2 MFC set to  0.000000
8/18/2010	2:58:07 PM	BCl3 MFC set to  0.000000
8/18/2010	2:58:07 PM	PHl3 MFC set to  0.000000
8/18/2010	2:58:07 PM	SiCl4 MFC set to  0.000000
8/18/2010	2:58:07 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	2:58:07 PM	Tube furnace set to 0
8/18/2010	2:58:07 PM	Run finished at 2:58 PM
8/18/2010	2:58:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2010	3:01:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	3:01:36 PM	Recipe started at 3:01 PM
8/18/2010	3:01:36 PM	Helium valve closed
8/18/2010	3:01:36 PM	H2 valve closed
8/18/2010	3:01:36 PM	BCl3 valve closed
8/18/2010	3:01:36 PM	PH3 valve closed
8/18/2010	3:01:36 PM	SiCl4 pre valve closed
8/18/2010	3:01:36 PM	SiCl4 post valve closed
8/18/2010	3:01:36 PM	Main Vac valve closed
8/18/2010	3:01:36 PM	Bubbler valve closed
8/18/2010	3:01:36 PM	Bypass valve opened
8/18/2010	3:01:36 PM	Helium MFC set to  0.000000
8/18/2010	3:01:36 PM	H2 MFC set to  0.000000
8/18/2010	3:01:36 PM	BCl3 MFC set to  0.000000
8/18/2010	3:01:36 PM	PHl3 MFC set to  0.000000
8/18/2010	3:01:36 PM	SiCl4 MFC set to  0.000000
8/18/2010	3:01:36 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	3:01:36 PM	Tube furnace set to 0
8/18/2010	3:02:14 PM	Helium valve closed
8/18/2010	3:02:14 PM	H2 valve closed
8/18/2010	3:02:14 PM	BCl3 valve closed
8/18/2010	3:02:14 PM	PH3 valve closed
8/18/2010	3:02:14 PM	SiCl4 pre valve closed
8/18/2010	3:02:14 PM	SiCl4 post valve closed
8/18/2010	3:02:14 PM	Bubbler valve closed
8/18/2010	3:02:14 PM	Main Vac valve opened
8/18/2010	3:02:14 PM	Bypass valve opened
8/18/2010	3:02:14 PM	Helium MFC set to  0.000000
8/18/2010	3:02:14 PM	H2 MFC set to  0.000000
8/18/2010	3:02:14 PM	BCl3 MFC set to  0.000000
8/18/2010	3:02:14 PM	PHl3 MFC set to  0.000000
8/18/2010	3:02:14 PM	SiCl4 MFC set to  0.000000
8/18/2010	3:02:14 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	3:02:14 PM	Tube furnace set to 0
8/18/2010	3:02:15 PM	Run finished at 3:02 PM
8/18/2010	3:02:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	3:02:23 PM	Helium MFC set to  50.000000
8/18/2010	3:02:24 PM	Helium valve opened
8/18/2010	3:21:02 PM	Helium valve closed
8/18/2010	3:21:39 PM	Helium valve opened
8/18/2010	3:44:42 PM	Helium valve closed
8/18/2010	3:47:19 PM	Helium valve opened
8/18/2010	3:56:50 PM	Helium valve closed
8/18/2010	3:57:59 PM	Recipe started at 3:57 PM
8/18/2010	3:57:59 PM	Helium valve closed
8/18/2010	3:57:59 PM	BCl3 valve closed
8/18/2010	3:57:59 PM	PH3 valve closed
8/18/2010	3:57:59 PM	SiCl4 pre valve closed
8/18/2010	3:57:59 PM	SiCl4 post valve closed
8/18/2010	3:57:59 PM	Main Vac valve closed
8/18/2010	3:57:59 PM	Bypass valve closed
8/18/2010	3:57:59 PM	Bubbler valve closed
8/18/2010	3:57:59 PM	H2 valve opened
8/18/2010	3:57:59 PM	Helium MFC set to  0.000000
8/18/2010	3:57:59 PM	H2 MFC set to  500.000000
8/18/2010	3:57:59 PM	BCl3 MFC set to  0.000000
8/18/2010	3:57:59 PM	PHl3 MFC set to  0.000000
8/18/2010	3:57:59 PM	SiCl4 MFC set to  0.000000
8/18/2010	3:57:59 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	3:57:59 PM	Tube furnace set to 1000
8/18/2010	3:59:20 PM	Helium valve closed
8/18/2010	3:59:20 PM	BCl3 valve closed
8/18/2010	3:59:20 PM	PH3 valve closed
8/18/2010	3:59:20 PM	SiCl4 pre valve closed
8/18/2010	3:59:20 PM	SiCl4 post valve closed
8/18/2010	3:59:20 PM	Main Vac valve closed
8/18/2010	3:59:20 PM	Bypass valve closed
8/18/2010	3:59:20 PM	H2 valve opened
8/18/2010	3:59:20 PM	Bubbler valve opened
8/18/2010	3:59:20 PM	Helium MFC set to  0.000000
8/18/2010	3:59:20 PM	H2 MFC set to  500.000000
8/18/2010	3:59:20 PM	BCl3 MFC set to  0.000000
8/18/2010	3:59:20 PM	PHl3 MFC set to  0.000000
8/18/2010	3:59:20 PM	SiCl4 MFC set to  0.000000
8/18/2010	3:59:20 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	3:59:20 PM	Tube furnace set to 1000
8/18/2010	4:19:20 PM	Helium valve closed
8/18/2010	4:19:20 PM	BCl3 valve closed
8/18/2010	4:19:20 PM	PH3 valve closed
8/18/2010	4:19:20 PM	Main Vac valve closed
8/18/2010	4:19:20 PM	Bypass valve closed
8/18/2010	4:19:20 PM	H2 valve opened
8/18/2010	4:19:20 PM	SiCl4 pre valve opened
8/18/2010	4:19:20 PM	SiCl4 post valve opened
8/18/2010	4:19:20 PM	Bubbler valve opened
8/18/2010	4:19:20 PM	Helium MFC set to  0.000000
8/18/2010	4:19:20 PM	H2 MFC set to  500.000000
8/18/2010	4:19:20 PM	BCl3 MFC set to  0.000000
8/18/2010	4:19:20 PM	PHl3 MFC set to  0.000000
8/18/2010	4:19:20 PM	SiCl4 MFC set to  50.000000
8/18/2010	4:19:20 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	4:19:20 PM	Tube furnace set to 1000
8/18/2010	4:39:20 PM	BCl3 valve closed
8/18/2010	4:39:20 PM	PH3 valve closed
8/18/2010	4:39:20 PM	SiCl4 pre valve closed
8/18/2010	4:39:20 PM	SiCl4 post valve closed
8/18/2010	4:39:20 PM	Main Vac valve closed
8/18/2010	4:39:20 PM	Bypass valve closed
8/18/2010	4:39:20 PM	Helium valve opened
8/18/2010	4:39:20 PM	H2 valve opened
8/18/2010	4:39:20 PM	Bubbler valve opened
8/18/2010	4:39:20 PM	Helium MFC set to  250.000000
8/18/2010	4:39:20 PM	H2 MFC set to  250.000000
8/18/2010	4:39:20 PM	BCl3 MFC set to  0.000000
8/18/2010	4:39:20 PM	PHl3 MFC set to  0.000000
8/18/2010	4:39:20 PM	SiCl4 MFC set to  0.000000
8/18/2010	4:39:20 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	4:39:20 PM	Tube furnace set to 0
8/18/2010	5:12:40 PM	Helium valve closed
8/18/2010	5:12:40 PM	H2 valve closed
8/18/2010	5:12:40 PM	BCl3 valve closed
8/18/2010	5:12:40 PM	PH3 valve closed
8/18/2010	5:12:40 PM	SiCl4 pre valve closed
8/18/2010	5:12:40 PM	SiCl4 post valve closed
8/18/2010	5:12:40 PM	Main Vac valve closed
8/18/2010	5:12:40 PM	Bypass valve closed
8/18/2010	5:12:40 PM	Bubbler valve closed
8/18/2010	5:12:40 PM	Helium MFC set to  0.000000
8/18/2010	5:12:40 PM	H2 MFC set to  0.000000
8/18/2010	5:12:40 PM	BCl3 MFC set to  0.000000
8/18/2010	5:12:40 PM	PHl3 MFC set to  0.000000
8/18/2010	5:12:40 PM	SiCl4 MFC set to  0.000000
8/18/2010	5:12:40 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	5:12:40 PM	Tube furnace set to 0
8/18/2010	5:12:41 PM	Run finished at 5:12 PM
8/18/2010	5:30:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	5:30:01 PM	Recipe started at 5:30 PM
8/18/2010	5:30:01 PM	Helium valve closed
8/18/2010	5:30:01 PM	H2 valve closed
8/18/2010	5:30:01 PM	BCl3 valve closed
8/18/2010	5:30:01 PM	PH3 valve closed
8/18/2010	5:30:01 PM	SiCl4 pre valve closed
8/18/2010	5:30:01 PM	SiCl4 post valve closed
8/18/2010	5:30:01 PM	Main Vac valve closed
8/18/2010	5:30:01 PM	Bubbler valve closed
8/18/2010	5:30:01 PM	Bypass valve opened
8/18/2010	5:30:01 PM	Helium MFC set to  0.000000
8/18/2010	5:30:01 PM	H2 MFC set to  0.000000
8/18/2010	5:30:01 PM	BCl3 MFC set to  0.000000
8/18/2010	5:30:01 PM	PHl3 MFC set to  0.000000
8/18/2010	5:30:01 PM	SiCl4 MFC set to  0.000000
8/18/2010	5:30:01 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	5:30:01 PM	Tube furnace set to 0
8/18/2010	5:30:38 PM	Helium valve closed
8/18/2010	5:30:38 PM	H2 valve closed
8/18/2010	5:30:38 PM	BCl3 valve closed
8/18/2010	5:30:38 PM	PH3 valve closed
8/18/2010	5:30:38 PM	SiCl4 pre valve closed
8/18/2010	5:30:38 PM	SiCl4 post valve closed
8/18/2010	5:30:38 PM	Bubbler valve closed
8/18/2010	5:30:38 PM	Main Vac valve opened
8/18/2010	5:30:38 PM	Bypass valve opened
8/18/2010	5:30:38 PM	Helium MFC set to  0.000000
8/18/2010	5:30:38 PM	H2 MFC set to  0.000000
8/18/2010	5:30:38 PM	BCl3 MFC set to  0.000000
8/18/2010	5:30:38 PM	PHl3 MFC set to  0.000000
8/18/2010	5:30:38 PM	SiCl4 MFC set to  0.000000
8/18/2010	5:30:38 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	5:30:38 PM	Tube furnace set to 0
8/18/2010	5:30:38 PM	Run finished at 5:30 PM
8/18/2010	5:30:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	5:34:57 PM	Helium MFC set to  50.000000
8/18/2010	5:34:57 PM	Helium valve opened
8/18/2010	5:57:15 PM	Helium valve closed
8/18/2010	5:58:07 PM	Helium valve opened
8/18/2010	6:04:05 PM	Helium valve closed
8/18/2010	6:05:25 PM	Recipe started at 6:05 PM
8/18/2010	6:05:25 PM	Helium valve closed
8/18/2010	6:05:25 PM	BCl3 valve closed
8/18/2010	6:05:25 PM	PH3 valve closed
8/18/2010	6:05:25 PM	SiCl4 pre valve closed
8/18/2010	6:05:25 PM	SiCl4 post valve closed
8/18/2010	6:05:25 PM	Main Vac valve closed
8/18/2010	6:05:25 PM	Bypass valve closed
8/18/2010	6:05:25 PM	Bubbler valve closed
8/18/2010	6:05:25 PM	H2 valve opened
8/18/2010	6:05:25 PM	Helium MFC set to  0.000000
8/18/2010	6:05:25 PM	H2 MFC set to  500.000000
8/18/2010	6:05:25 PM	BCl3 MFC set to  0.000000
8/18/2010	6:05:25 PM	PHl3 MFC set to  0.000000
8/18/2010	6:05:25 PM	SiCl4 MFC set to  0.000000
8/18/2010	6:05:25 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	6:05:25 PM	Tube furnace set to 1000
8/18/2010	6:06:45 PM	Helium valve closed
8/18/2010	6:06:45 PM	BCl3 valve closed
8/18/2010	6:06:45 PM	PH3 valve closed
8/18/2010	6:06:45 PM	SiCl4 pre valve closed
8/18/2010	6:06:45 PM	SiCl4 post valve closed
8/18/2010	6:06:45 PM	Main Vac valve closed
8/18/2010	6:06:45 PM	Bypass valve closed
8/18/2010	6:06:45 PM	H2 valve opened
8/18/2010	6:06:45 PM	Bubbler valve opened
8/18/2010	6:06:45 PM	Helium MFC set to  0.000000
8/18/2010	6:06:45 PM	H2 MFC set to  500.000000
8/18/2010	6:06:45 PM	BCl3 MFC set to  0.000000
8/18/2010	6:06:45 PM	PHl3 MFC set to  0.000000
8/18/2010	6:06:45 PM	SiCl4 MFC set to  0.000000
8/18/2010	6:06:45 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	6:06:45 PM	Tube furnace set to 1000
8/18/2010	6:26:45 PM	Helium valve closed
8/18/2010	6:26:45 PM	BCl3 valve closed
8/18/2010	6:26:45 PM	PH3 valve closed
8/18/2010	6:26:45 PM	Main Vac valve closed
8/18/2010	6:26:45 PM	Bypass valve closed
8/18/2010	6:26:45 PM	H2 valve opened
8/18/2010	6:26:45 PM	SiCl4 pre valve opened
8/18/2010	6:26:45 PM	SiCl4 post valve opened
8/18/2010	6:26:45 PM	Bubbler valve opened
8/18/2010	6:26:45 PM	Helium MFC set to  0.000000
8/18/2010	6:26:45 PM	H2 MFC set to  500.000000
8/18/2010	6:26:45 PM	BCl3 MFC set to  0.000000
8/18/2010	6:26:45 PM	PHl3 MFC set to  0.000000
8/18/2010	6:26:45 PM	SiCl4 MFC set to  50.000000
8/18/2010	6:26:45 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	6:26:45 PM	Tube furnace set to 1000
8/18/2010	6:46:45 PM	BCl3 valve closed
8/18/2010	6:46:45 PM	PH3 valve closed
8/18/2010	6:46:45 PM	SiCl4 pre valve closed
8/18/2010	6:46:45 PM	SiCl4 post valve closed
8/18/2010	6:46:45 PM	Main Vac valve closed
8/18/2010	6:46:45 PM	Bypass valve closed
8/18/2010	6:46:45 PM	Helium valve opened
8/18/2010	6:46:45 PM	H2 valve opened
8/18/2010	6:46:45 PM	Bubbler valve opened
8/18/2010	6:46:45 PM	Helium MFC set to  250.000000
8/18/2010	6:46:45 PM	H2 MFC set to  250.000000
8/18/2010	6:46:45 PM	BCl3 MFC set to  0.000000
8/18/2010	6:46:45 PM	PHl3 MFC set to  0.000000
8/18/2010	6:46:45 PM	SiCl4 MFC set to  0.000000
8/18/2010	6:46:45 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	6:46:45 PM	Tube furnace set to 0
8/18/2010	7:17:59 PM	Run aborted at 7:17 PM
8/18/2010	7:17:59 PM	Helium valve closed
8/18/2010	7:17:59 PM	H2 valve closed
8/18/2010	7:17:59 PM	BCl3 valve closed
8/18/2010	7:17:59 PM	PH3 valve closed
8/18/2010	7:18:00 PM	SiCl4 pre valve closed
8/18/2010	7:18:00 PM	SiCl4 post valve closed
8/18/2010	7:18:00 PM	Bypass valve closed
8/18/2010	7:18:00 PM	Main Vac valve closed
8/18/2010	7:18:00 PM	Bubbler valve closed
8/18/2010	7:18:00 PM	Helium MFC set to  0.000000
8/18/2010	7:18:00 PM	H2 MFC set to  0.000000
8/18/2010	7:18:00 PM	BCl3 MFC set to  0.000000
8/18/2010	7:18:00 PM	PHl3 MFC set to  0.000000
8/18/2010	7:18:00 PM	SiCl4 MFC set to  0.000000
8/18/2010	7:18:00 PM	Tube furnace set to 0
8/18/2010	7:22:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	7:22:03 PM	Recipe started at 7:22 PM
8/18/2010	7:22:03 PM	Helium valve closed
8/18/2010	7:22:03 PM	H2 valve closed
8/18/2010	7:22:03 PM	BCl3 valve closed
8/18/2010	7:22:03 PM	PH3 valve closed
8/18/2010	7:22:03 PM	SiCl4 pre valve closed
8/18/2010	7:22:03 PM	SiCl4 post valve closed
8/18/2010	7:22:03 PM	Main Vac valve closed
8/18/2010	7:22:03 PM	Bubbler valve closed
8/18/2010	7:22:03 PM	Bypass valve opened
8/18/2010	7:22:03 PM	Helium MFC set to  0.000000
8/18/2010	7:22:03 PM	H2 MFC set to  0.000000
8/18/2010	7:22:03 PM	BCl3 MFC set to  0.000000
8/18/2010	7:22:03 PM	PHl3 MFC set to  0.000000
8/18/2010	7:22:03 PM	SiCl4 MFC set to  0.000000
8/18/2010	7:22:03 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	7:22:03 PM	Tube furnace set to 0
8/18/2010	7:22:40 PM	Helium valve closed
8/18/2010	7:22:40 PM	H2 valve closed
8/18/2010	7:22:40 PM	BCl3 valve closed
8/18/2010	7:22:40 PM	PH3 valve closed
8/18/2010	7:22:40 PM	SiCl4 pre valve closed
8/18/2010	7:22:40 PM	SiCl4 post valve closed
8/18/2010	7:22:40 PM	Bubbler valve closed
8/18/2010	7:22:40 PM	Main Vac valve opened
8/18/2010	7:22:40 PM	Bypass valve opened
8/18/2010	7:22:40 PM	Helium MFC set to  0.000000
8/18/2010	7:22:40 PM	H2 MFC set to  0.000000
8/18/2010	7:22:40 PM	BCl3 MFC set to  0.000000
8/18/2010	7:22:40 PM	PHl3 MFC set to  0.000000
8/18/2010	7:22:40 PM	SiCl4 MFC set to  0.000000
8/18/2010	7:22:40 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	7:22:40 PM	Tube furnace set to 0
8/18/2010	7:22:40 PM	Run finished at 7:22 PM
8/18/2010	7:22:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	7:22:45 PM	Helium MFC set to  75.000000
8/18/2010	7:22:45 PM	Helium valve opened
8/18/2010	7:24:34 PM	Helium valve closed
8/18/2010	7:24:39 PM	Helium MFC set to  30.000000
8/18/2010	7:24:39 PM	Helium valve opened
8/18/2010	9:11:44 PM	Helium valve closed
8/18/2010	9:14:35 PM	Recipe started at 9:14 PM
8/18/2010	9:14:35 PM	Helium valve closed
8/18/2010	9:14:35 PM	BCl3 valve closed
8/18/2010	9:14:35 PM	PH3 valve closed
8/18/2010	9:14:35 PM	SiCl4 pre valve closed
8/18/2010	9:14:35 PM	SiCl4 post valve closed
8/18/2010	9:14:35 PM	Main Vac valve closed
8/18/2010	9:14:35 PM	Bypass valve closed
8/18/2010	9:14:35 PM	Bubbler valve closed
8/18/2010	9:14:35 PM	H2 valve opened
8/18/2010	9:14:35 PM	Helium MFC set to  0.000000
8/18/2010	9:14:35 PM	H2 MFC set to  500.000000
8/18/2010	9:14:35 PM	BCl3 MFC set to  0.000000
8/18/2010	9:14:35 PM	PHl3 MFC set to  0.000000
8/18/2010	9:14:35 PM	SiCl4 MFC set to  0.000000
8/18/2010	9:14:35 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	9:14:35 PM	Tube furnace set to 1000
8/18/2010	9:15:56 PM	Helium valve closed
8/18/2010	9:15:56 PM	BCl3 valve closed
8/18/2010	9:15:56 PM	PH3 valve closed
8/18/2010	9:15:56 PM	SiCl4 pre valve closed
8/18/2010	9:15:56 PM	SiCl4 post valve closed
8/18/2010	9:15:56 PM	Main Vac valve closed
8/18/2010	9:15:56 PM	Bypass valve closed
8/18/2010	9:15:56 PM	H2 valve opened
8/18/2010	9:15:56 PM	Bubbler valve opened
8/18/2010	9:15:56 PM	Helium MFC set to  0.000000
8/18/2010	9:15:56 PM	H2 MFC set to  500.000000
8/18/2010	9:15:56 PM	BCl3 MFC set to  0.000000
8/18/2010	9:15:56 PM	PHl3 MFC set to  0.000000
8/18/2010	9:15:56 PM	SiCl4 MFC set to  0.000000
8/18/2010	9:15:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	9:15:56 PM	Tube furnace set to 1000
8/18/2010	9:35:56 PM	Helium valve closed
8/18/2010	9:35:56 PM	BCl3 valve closed
8/18/2010	9:35:56 PM	PH3 valve closed
8/18/2010	9:35:56 PM	Main Vac valve closed
8/18/2010	9:35:56 PM	Bypass valve closed
8/18/2010	9:35:56 PM	H2 valve opened
8/18/2010	9:35:56 PM	SiCl4 pre valve opened
8/18/2010	9:35:56 PM	SiCl4 post valve opened
8/18/2010	9:35:56 PM	Bubbler valve opened
8/18/2010	9:35:56 PM	Helium MFC set to  0.000000
8/18/2010	9:35:56 PM	H2 MFC set to  500.000000
8/18/2010	9:35:56 PM	BCl3 MFC set to  0.000000
8/18/2010	9:35:56 PM	PHl3 MFC set to  0.000000
8/18/2010	9:35:56 PM	SiCl4 MFC set to  50.000000
8/18/2010	9:35:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	9:35:56 PM	Tube furnace set to 1000
8/18/2010	9:50:56 PM	BCl3 valve closed
8/18/2010	9:50:56 PM	PH3 valve closed
8/18/2010	9:50:56 PM	SiCl4 pre valve closed
8/18/2010	9:50:56 PM	SiCl4 post valve closed
8/18/2010	9:50:56 PM	Main Vac valve closed
8/18/2010	9:50:56 PM	Bypass valve closed
8/18/2010	9:50:56 PM	Helium valve opened
8/18/2010	9:50:56 PM	H2 valve opened
8/18/2010	9:50:56 PM	Bubbler valve opened
8/18/2010	9:50:56 PM	Helium MFC set to  250.000000
8/18/2010	9:50:56 PM	H2 MFC set to  250.000000
8/18/2010	9:50:56 PM	BCl3 MFC set to  0.000000
8/18/2010	9:50:56 PM	PHl3 MFC set to  0.000000
8/18/2010	9:50:56 PM	SiCl4 MFC set to  0.000000
8/18/2010	9:50:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	9:50:56 PM	Tube furnace set to 0
8/18/2010	10:24:16 PM	Helium valve closed
8/18/2010	10:24:16 PM	H2 valve closed
8/18/2010	10:24:16 PM	BCl3 valve closed
8/18/2010	10:24:16 PM	PH3 valve closed
8/18/2010	10:24:16 PM	SiCl4 pre valve closed
8/18/2010	10:24:16 PM	SiCl4 post valve closed
8/18/2010	10:24:16 PM	Main Vac valve closed
8/18/2010	10:24:16 PM	Bypass valve closed
8/18/2010	10:24:16 PM	Bubbler valve closed
8/18/2010	10:24:16 PM	Helium MFC set to  0.000000
8/18/2010	10:24:16 PM	H2 MFC set to  0.000000
8/18/2010	10:24:16 PM	BCl3 MFC set to  0.000000
8/18/2010	10:24:16 PM	PHl3 MFC set to  0.000000
8/18/2010	10:24:16 PM	SiCl4 MFC set to  0.000000
8/18/2010	10:24:16 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	10:24:16 PM	Tube furnace set to 0
8/18/2010	10:24:17 PM	Run finished at 10:24 PM
8/18/2010	10:48:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	10:48:24 PM	Recipe started at 10:48 PM
8/18/2010	10:48:24 PM	Helium valve closed
8/18/2010	10:48:24 PM	H2 valve closed
8/18/2010	10:48:24 PM	BCl3 valve closed
8/18/2010	10:48:24 PM	PH3 valve closed
8/18/2010	10:48:24 PM	SiCl4 pre valve closed
8/18/2010	10:48:24 PM	SiCl4 post valve closed
8/18/2010	10:48:24 PM	Main Vac valve closed
8/18/2010	10:48:24 PM	Bubbler valve closed
8/18/2010	10:48:24 PM	Bypass valve opened
8/18/2010	10:48:24 PM	Helium MFC set to  0.000000
8/18/2010	10:48:24 PM	H2 MFC set to  0.000000
8/18/2010	10:48:24 PM	BCl3 MFC set to  0.000000
8/18/2010	10:48:24 PM	PHl3 MFC set to  0.000000
8/18/2010	10:48:24 PM	SiCl4 MFC set to  0.000000
8/18/2010	10:48:24 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	10:48:24 PM	Tube furnace set to 0
8/18/2010	10:49:02 PM	Helium valve closed
8/18/2010	10:49:02 PM	H2 valve closed
8/18/2010	10:49:02 PM	BCl3 valve closed
8/18/2010	10:49:02 PM	PH3 valve closed
8/18/2010	10:49:02 PM	SiCl4 pre valve closed
8/18/2010	10:49:02 PM	SiCl4 post valve closed
8/18/2010	10:49:02 PM	Bubbler valve closed
8/18/2010	10:49:02 PM	Main Vac valve opened
8/18/2010	10:49:02 PM	Bypass valve opened
8/18/2010	10:49:02 PM	Helium MFC set to  0.000000
8/18/2010	10:49:02 PM	H2 MFC set to  0.000000
8/18/2010	10:49:02 PM	BCl3 MFC set to  0.000000
8/18/2010	10:49:02 PM	PHl3 MFC set to  0.000000
8/18/2010	10:49:02 PM	SiCl4 MFC set to  0.000000
8/18/2010	10:49:02 PM	Bypass solenoid MFC set to  0.000000
8/18/2010	10:49:02 PM	Tube furnace set to 0
8/18/2010	10:49:03 PM	Run finished at 10:49 PM
8/18/2010	10:49:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2010	10:49:14 PM	Helium MFC set to  35.000000
8/18/2010	10:49:15 PM	Helium valve opened
8/18/2010	11:40:42 PM	Helium valve closed
8/18/2010	11:41:04 PM	Helium MFC set to  70.000000
8/18/2010	11:41:28 PM	Helium valve opened
